本研究以銅當中心金屬,以物理氣相蒸鍍法將CuPc及蒸鍍在玻璃基板、金基質面以及電極上,藉由改變熱處理條件來製備薄膜,並利用X光繞射法(XRD)及掃描式電子顯微鏡(SEM)分析其薄膜晶相及表面結構,並探討其對二氧化氮氣體感測特性的影響。 就薄膜結構而言,經熱處理後CuPc表面形態由無結晶方向變為與基板傾斜的結晶方向。在二氧化氮氣體感測的結果發現,未經熱處理的薄膜因無結晶性而有較大的表面積,故靈敏度最大,但所需的回復時間也最長。 Copper phthalocyanine (CuPc) was vacuum deposited onto substrates of glass, gold, and electrode to study the effects of heat treatment on the film structure and the related sensing properties to NO/sub 2/. The surface morphology and the crystal structure are investigated by scanning electron microscopy (SEM) and X-ray diffraction (XRD), respectively. The films without heat treatment showed an amorphous and fine-grain structure. Due to its looser structure, a higher surface area and thus, higher sensitivity were resulted. However, the recovery time is longer, which is related to the in-diffusion of NO/sub 2/ into the bulk phase.