In situ high-resolution thermal microscopy on integrated circuits

doi:10.1364/OE.25.021548

CNU IR > College of Sustainable Environment and Recreation > Dept. of Sports Management > Periodical Articles > Item 310902800/31750

Please use this identifier to cite or link to this item: https://ir.cnu.edu.tw/handle/310902800/31750

Title:	In situ high-resolution thermal microscopy on integrated circuits
Authors:	Zhuo, Guan-Yu Su, Hai-Ching Wang, Hsien-Yi Chan, Ming-Che
Contributors:	Natl Sun Yat Sen Univ, Inst Med Sci & Technol Natl Chiao Tung Univ, Inst Lighting & Energy Photon, Coll Photon Chia Nan Univ Pharm & Sci, Dept Sports Management Chi Mei Med Ctr, Dept Nephrol Natl Chiao Tung Univ, Inst Photon Syst, Coll Photon
Keywords:	Rhodamine Dyes 2-Photon Microscopy Fluorescence Laser
Date:	2017-09-04
Issue Date:	2018-11-30 15:55:18 (UTC+8)
Publisher:	Optical Soc Amer
Abstract:	The miniaturization of metal tracks in integrated circuits (ICs) can cause abnormal heat dissipation, resulting in electrostatic discharge, overvoltage breakdown, and other unwanted issues. Unfortunately, locating areas of abnormal heat dissipation is limited either by the spatial resolution or imaging acquisition speed of current thermal analytical techniques. A rapid, non-contact approach to the thermal imaging of ICs with sub-mu m resolution could help to alleviate this issue. In this work, based on the intensity of the temperature-dependent two-photon fluorescence (TPF) of Rhodamine 6G (R6G) material, we developed a novel fast and non-invasive thermal microscopy with a sub-mu m resolution. Its application to the location of hotspots that may evolve into thermally induced defects in ICs was also demonstrated. To the best of our knowledge, this is the first study to present highresolution 2D thermal microscopic images of ICs, showing the generation, propagation, and distribution of heat during its operation. According to the demonstrated results, this scheme has considerable potential for future in situ hotspot analysis during the optimization stage of IC development. (C) 2017 Optical Society \of America
Relation:	Optics Express, v.25, n.18, pp.21548-21558
Appears in Collections:	[Dept. of Sports Management] Periodical Articles

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