薄膜製作及其在氣體感測器應用之研究---物理氣相蒸鍍有機薄膜及其在氣體感測器應用之研究

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Title:	薄膜製作及其在氣體感測器應用之研究---物理氣相蒸鍍有機薄膜及其在氣體感測器應用之研究 Physical Vapor Deposition of Organic Thin Films and Its Application on Gas Sensor
Authors:	李玉郎
Contributors:	醫藥化學系
Keywords:	銅鈦花青氣體感測器基板溫度薄膜結構 Copper phthalocyanine Gas sensor Substrate temperature Film structure
Date:	2000
Issue Date:	2008-11-21 10:34:14 (UTC+8)
Publisher:	台南縣：嘉南藥理科技大學醫藥化學系
Abstract:	本研究利用物理氣相蒸鍍法將銅鈦花青(Copper Phthalocyanine, CuPc) 蒸鍍在玻璃基板、金基質面以及電極上，藉由基板溫度的改變來製備薄膜，並利用X 光繞射法(XRD)及掃描式電子顯微鏡（SEM）分析其薄膜晶相及表面結構，並探討其對二氧化氮氣體感測特性的影響。實驗結果顯示CuPc 的晶相為β相結晶，且不受基板溫度提高而改變，但其表面形態則因基板溫度的提高而由細晶粒形態變為線狀紋路，再變為鬚晶。基板溫度對氣體感測的影響，在基板溫度100℃時有最大的靈敏度。基板溫度提高至150℃後，因為鬚晶結構較不緻密，氣體脫附較易而使得回復時間縮短。 Copper phthalocyanine (CuPc) was vacuumdeposited onto substrates of glass, gold and electrode to study the effects of substrate temperature on the film structure. The CuPc films were characterize by the X-ray diffraction (XRD) and Scanning electron microscopy (SEM), and were related to the gas sensing properties to NO2. The results show that CuPc films have a â form structure, which is independent to the substrate temperature. However, when the substrate temperature is elevated gradually, the film morphology varies from a fine-grain crystal to fiber-like, and then to a whisker structure. The film prepared at 100 oC has a highest sensitivity to NO2. But due to the loosely packed characteristic of whisker structure, the film prepared at elevated temperature has a fast recovery time.
Relation:	計畫編號：NSC89-2214-E041-002
Appears in Collections:	[Dept. of Food & Drug Industry and Inspective Technology] MOST Project

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