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    Please use this identifier to cite or link to this item: http://ir.cnu.edu.tw/handle/310902800/4438

    標題: 氮氧化物於高週波電漿系統中反應之研究
    Reaction Mechanism of NOX in an RF Plasma System
    作者: 林俊成
    Chun-Cheng Lin
    貢獻者: 王雅玢
    關鍵字: 高週波電漿
    radio-frequency plasma
    nitrogen oxides
    日期: 2003
    上傳時間: 2008-10-08 15:45:25 (UTC+8)
    摘要: 本研究係利用自行設計之反應器,利用高週波電漿對氮氧化物(NOX)進行還原反應。實驗探討各個操作參數:輸入必v、NO/NO2/N2O進流濃度、操作壓力、添加不同反應劑以及進流
    在NO系統中,使用Ar為載流氣體,於30 W輸入必v下,轉化率即可達97%以上,並以形成N2 為主要產物;若使用 N2 為載流氣體,於30 W輸入必v下,轉化率為77.5%。另外,NO/
    N2系統於不同含氧量(2.0%~10.0%)之環境中,顯示 NOX 之轉化率隨含氧量上升迅速下降,但仍可透過提高輸入必v改善之。至於在NO/N2系統中添加含碳化合物:CO、CO2、CH4或
    balance)而言,於輸入必v120 W時,NO2轉化達100%,NO轉化率可達61.5%,顯示此電漿技術具有還原氮氧化物為氮氣之發展潛力。
    Application of radio-frequency (RF) plasma for the reduction of Nitrogen
    oxides (NOX) is demonstrated. Experiments were conducted to elucidate the
    effects of operational parameters on the conversion of NOX , the species of
    products and the molar fraction of products. The operational parameters
    including input power, NOX feeding concentration, operational pressure,
    carrier gas (N2/Ar) and additives were investigated. Furthermore, the possible
    reaction pathways of conversion of NOX in an RF plasma system were discussed.
    When used Ar as the carrier gas, the conversion of NO was over 97% under 30 W
    of input power, while the conversion of NO reached only 77.5% at 30 W in the
    NO/N2 system. The main product was N2 in both NO/Ar and NO/Ar systems. In the
    NO/N2 system, the conversion of NO reduced as increasing the inlet
    concentration of O2 (2%~10%), however, the conversion could be improved by
    elevating the input power. The addition of additives (CO, CO2, CH4, C2H4)
    elevated the conversion of NO, and yielded CO and CO2 as the major products to
    inhibit the formation of NO2 and N2O and to result in the N2 as the only
    predominant N-containing product. Under the condition of NO(1%)/NO2(0.5)/O2(
    10%)/N2(balance), the conversions of NO and NO2 reached 61.5% and 100%,
    respectively, at 120 W, to indicate this technology is potential for the
    reduction of NOX into N2.
    關聯: 校內外完全公開
    Appears in Collections:[環境工程與科學系(所)] 博碩士論文

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