臺灣高科技產業因製程所需的精密儀器及其他硬體設備價值皆遠高於其他傳統產業，又因涉及化學品、電氣、化學反應、廠房結構等複雜因素，一旦發生火災會導致巨大損失。找出起火處、起火原因除可釐清刑事、民事責任外，亦可做為防止火災事故重複發生之參考。本研究以南部高科技產業中的太陽能產業為主要研究範圍，並以曾發生過火災的廠區為研究對象，採用個案研究法六個步驟進行研究探討。依據內政部消防署頒佈2000年發佈並於2005年及2009年修改實行之「火災調查鑑定標準作業程序」規定，進行火災現場勘查、製作訪談筆錄及參考轄區分隊出動觀察記錄，以釐清起火戶、起火處及起火原因等三部分。最後根據案例勘查結果，進行研究對象起火及火勢蔓延等原因分析。研究結果發現：（一）既設科技廠潔淨室防火、防煙區劃不完整，導致火勢蔓延。（二）既設科技廠未定期檢測潔淨室蝕刻機臺之電源裝置的電源導線，導致電源導線劣化造成短路，形成發火源。（三）蝕刻機臺設置未依規定設置適當之消防安全設備，起火後，無法立即有效滅火，導致火勢擴大 Because the precision instruments and machinery which Taiwanese high-technology industry uses for manufacturing process are much more expensive than other traditional industries, and because of other complex factors such as chemicals, electricity, chemical reaction and plant structure, the industry may be lead to tremendous losses if a fire breaks out. Thus, finding out the origin and the cause of fire can not only clarify criminal and civil responsibility, but can also be references for preventing reoccurrence of similar fire accidents. This research focuses on the solar industry affiliated with the high-technology cluster located in the southern part of Taiwan. The main research object is a specific plant that had an outbreak of fire in the past. A case study method was adopted to help analyze the object. According to “the standard operating procedures of fire investigation and identification” decree implemented by national fire agency in year 2000 and amended in year 2005 and 2009, on-site fire investigation, documenting interview reports, and journey records from local fire agency branch are key criterions for clarifying the origin unit of fire, fire point and the cause of fire. The investigation of this case is used to analyze what caused the fire and fire spread of the plant was studied.The findings of this research are as follows:1. The existing fire and smoke protection zones in the cleanroom located in the technology plant were not planned soundly and resulted in fire spread.2. The technology plant did not inspect wires of power supply units on etching machines in the cleanroom periodically, which resulted in deterioration of wires and became fire ignition source.3. Settings of etching machines were against the regulation that fire safety equipment needed to be set up at a proper location. Therefore when the fire broke out, the fire could not be extinguished immediately and effectively, which caused a wide spread of fire.