氮氧化物於高週波電漿系統中反應之研究

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標題:	氮氧化物於高週波電漿系統中反應之研究 Reaction Mechanism of NOX in an RF Plasma System
作者:	林俊成 Chun-Cheng Lin
貢獻者:	王雅玢蔡政賢嘉南藥理科技大學：環境工程衛生研究所
關鍵字:	高週波電漿氮氧化物還原氮氣 radio-frequency plasma nitrogen oxides reduction nitrogen
日期:	2003
上傳時間:	2008-10-08 15:45:25 (UTC+8)
摘要:	本研究係利用自行設計之反應器，利用高週波電漿對氮氧化物(NOX)進行還原反應。實驗探討各個操作參數：輸入必v、NO/NO2/N2O進流濃度、操作壓力、添加不同反應劑以及進流不同載流氣體，對NOX分解率、產物物種及產物濃度之影響，並經由反應之生成物之分析，提出NOX於電漿系統中之可能反應機制。在NO系統中，使用Ar為載流氣體，於30 W輸入必v下，轉化率即可達97%以上，並以形成N2 為主要產物；若使用 N2 為載流氣體，於30 W輸入必v下，轉化率為77.5%。另外，NO/ N2系統於不同含氧量(2.0%~10.0%)之環境中，顯示 NOX 之轉化率隨含氧量上升迅速下降，但仍可透過提高輸入必v改善之。至於在NO/N2系統中添加含碳化合物：CO、CO2、CH4或 C2H4，除了可以提高轉化率外，產物明顯以CO及CO2為優勢物種，並且抑制NO2及N2O之形成，而有利於N2之生成。以模擬接近實際狀況之氣體組合NO(1%)/NO2(0.5)/O2(10%)/N2( balance)而言，於輸入必v120 W時，NO2轉化達100%，NO轉化率可達61.5%，顯示此電漿技術具有還原氮氧化物為氮氣之發展潛力。 Application of radio-frequency (RF) plasma for the reduction of Nitrogen oxides (NOX) is demonstrated. Experiments were conducted to elucidate the effects of operational parameters on the conversion of NOX , the species of products and the molar fraction of products. The operational parameters including input power, NOX feeding concentration, operational pressure, carrier gas (N2/Ar) and additives were investigated. Furthermore, the possible reaction pathways of conversion of NOX in an RF plasma system were discussed. When used Ar as the carrier gas, the conversion of NO was over 97% under 30 W of input power, while the conversion of NO reached only 77.5% at 30 W in the NO/N2 system. The main product was N2 in both NO/Ar and NO/Ar systems. In the NO/N2 system, the conversion of NO reduced as increasing the inlet concentration of O2 (2%~10%), however, the conversion could be improved by elevating the input power. The addition of additives (CO, CO2, CH4, C2H4) elevated the conversion of NO, and yielded CO and CO2 as the major products to inhibit the formation of NO2 and N2O and to result in the N2 as the only predominant N-containing product. Under the condition of NO(1%)/NO2(0.5)/O2( 10%)/N2(balance), the conversions of NO and NO2 reached 61.5% and 100%, respectively, at 120 W, to indicate this technology is potential for the reduction of NOX into N2.
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